零件清單 Parts List
IMPLANTOR
NISSIN EXCEED 2000
Power Supply - Arc
Power Supply - Filament
Power Supply - Trim-Q
Power Supply - Column
Power Supply - BSM DC
Power Supply - FARADAY SUPPRESSION
Power Supply - WAFER CHUCK
Power Supply - I/S Suppression
TC gauge
ION gauge
Controller - Yellow Controller
Controller - Red Controller
Controller - Beam Controller
SOURCE MEGNET PS
AWLOF-2 4S007-564-1 4S007-209-C RI-SIG (A30) I 26042 PDTCT-CPU(A30) I 12104 PDTCT-DRV(A31) I 14125 PDTCT-SIG(A32) I 4S017-365-C RI-DRV(A31) PELCL 30146-1A 4S013-116-B INTERFACE 4S015-028-B RI-CPU(A32)
STEPPER Parts
8" Chuck
8" Fetch Arm
8" Load Arm
2" Load Arm
In-line Module (Type 2)
Lamp house
IBM Personal Computer 720-66DX2
Signal Tower, Decoder Box
OF up/down
Stepper PCB
SD90V III(2)
TMP-1002LMC SN AG17
V208SC612GN(2) U110CWR(1)
SD90V III(2)
PUMP
TURBO MOLECULAR PUMP
KASHIYAMA SD90V III
DAIKIN CRYOPUMP